Micro-nano-integration based on automated serial assembly
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Thomas Wich, Christoph Edeler, Christian Stolle, Sergej Fatikow
Micro-nano-integration based on automated serial assembly
CASE, 2009.

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@inproceedings{CASE-2009-WichESF,
	author        = "Thomas Wich and Christoph Edeler and Christian Stolle and Sergej Fatikow",
	booktitle     = "{Proceedings of the Fifth International Conference on Automation Science and Engineering}",
	doi           = "10.1109/COASE.2009.5234150",
	isbn          = "978-1-4244-4578-3",
	pages         = "573--578",
	publisher     = "{IEEE}",
	title         = "{Micro-nano-integration based on automated serial assembly}",
	year          = 2009,
}

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