Thomas Wich, Christoph Edeler, Christian Stolle, Sergej Fatikow
Micro-nano-integration based on automated serial assembly
CASE, 2009.
@inproceedings{CASE-2009-WichESF, author = "Thomas Wich and Christoph Edeler and Christian Stolle and Sergej Fatikow", booktitle = "{Proceedings of the Fifth International Conference on Automation Science and Engineering}", doi = "10.1109/COASE.2009.5234150", isbn = "978-1-4244-4578-3", pages = "573--578", publisher = "{IEEE}", title = "{Micro-nano-integration based on automated serial assembly}", year = 2009, }