@inproceedings{CASE-2010-AhnM,
	author        = "Younghun Ahn and James R. Morrison",
	booktitle     = "{Proceedings of the Sixth International Conference on Automation Science and Engineering}",
	doi           = "10.1109/COASE.2010.5584530",
	isbn          = "978-1-4244-5447-1",
	pages         = "39--44",
	publisher     = "{IEEE}",
	title         = "{Analysis of circular cluster tools: Transient behavior and semiconductor equipment models}",
	year          = 2010,
}