Development of an automatic virtual metrology framework for TFT-LCD industry
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Min-Hsiung Hung, Hsien-Cheng Huang, Haw Ching Yang, Fan-Tien Cheng
Development of an automatic virtual metrology framework for TFT-LCD industry
CASE, 2010.

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@inproceedings{CASE-2010-HungHYC,
	author        = "Min-Hsiung Hung and Hsien-Cheng Huang and Haw Ching Yang and Fan-Tien Cheng",
	booktitle     = "{Proceedings of the Sixth International Conference on Automation Science and Engineering}",
	doi           = "10.1109/COASE.2010.5584541",
	isbn          = "978-1-4244-5447-1",
	pages         = "879--884",
	publisher     = "{IEEE}",
	title         = "{Development of an automatic virtual metrology framework for TFT-LCD industry}",
	year          = 2010,
}

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