Min-Hsiung Hung, Hsien-Cheng Huang, Haw Ching Yang, Fan-Tien Cheng
Development of an automatic virtual metrology framework for TFT-LCD industry
CASE, 2010.
@inproceedings{CASE-2010-HungHYC, author = "Min-Hsiung Hung and Hsien-Cheng Huang and Haw Ching Yang and Fan-Tien Cheng", booktitle = "{Proceedings of the Sixth International Conference on Automation Science and Engineering}", doi = "10.1109/COASE.2010.5584541", isbn = "978-1-4244-5447-1", pages = "879--884", publisher = "{IEEE}", title = "{Development of an automatic virtual metrology framework for TFT-LCD industry}", year = 2010, }