Daniel Jasper, Sergej Fatikow
Automated high-speed nanopositioning inside scanning electron microscopes
CASE, 2010.
@inproceedings{CASE-2010-JasperF, author = "Daniel Jasper and Sergej Fatikow", booktitle = "{Proceedings of the Sixth International Conference on Automation Science and Engineering}", doi = "10.1109/COASE.2010.5584075", isbn = "978-1-4244-5447-1", pages = "704--709", publisher = "{IEEE}", title = "{Automated high-speed nanopositioning inside scanning electron microscopes}", year = 2010, }