@inproceedings{DAC-1997-Tang,
	author        = "William C. Tang",
	booktitle     = "{Proceedings of the 34th Design Automation Conference}",
	doi           = "10.1145/266021.266316",
	isbn          = "0-89791-920-3",
	pages         = "670--673",
	publisher     = "{ACM Press}",
	title         = "{Overview of Microelectromechanical Systems and Design Processes}",
	year          = 1997,
}