A CAD Tool for Optical MEMS
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Timothy P. Kurzweg, Steven P. Levitan, Philippe J. Marchand, Jose A. Martinez, Kurt R. Prough, Donald M. Chiarulli
A CAD Tool for Optical MEMS
DAC, 1999.

DAC 1999
Full names Links ISxN
	author        = "Timothy P. Kurzweg and Steven P. Levitan and Philippe J. Marchand and Jose A. Martinez and Kurt R. Prough and Donald M. Chiarulli",
	booktitle     = "{Proceedings of the 36th Design Automation Conference}",
	doi           = "10.1145/309847.310092",
	pages         = "879--884",
	publisher     = "{ACM Press}",
	title         = "{A CAD Tool for Optical MEMS}",
	year          = 1999,

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