A cost-driven lithographic correction methodology based on off-the-shelf sizing tools
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Puneet Gupta, Andrew B. Kahng, Dennis Sylvester, Jie Yang
A cost-driven lithographic correction methodology based on off-the-shelf sizing tools
DAC, 2003.

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@inproceedings{DAC-2003-GuptaKSY,
	author        = "Puneet Gupta and Andrew B. Kahng and Dennis Sylvester and Jie Yang",
	booktitle     = "{Proceedings of the 40th Design Automation Conference}",
	doi           = "10.1145/775832.775840",
	isbn          = "1-58113-688-9",
	pages         = "16--21",
	publisher     = "{ACM}",
	title         = "{A cost-driven lithographic correction methodology based on off-the-shelf sizing tools}",
	year          = 2003,
}

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