Travelled to:1 × Italy
1 × USA
Collaborated with:F.Cheng W.Wu H.Huang
Talks about:metrolog (2) virtual (2) run (2) preliminari (1) relianc (1) develop (1) control (1) scheme (1) studi (1) phase (1)
Person: Chi-An Kao
DBLP: Kao:Chi=An
Contributed to:
20112007Wrote 2 papers:
- CASE-2011-KaoCW #case study
- Preliminary study of run-to-run control utilizing virtual metrology with reliance index (CAK, FTC, WMW), pp. 256–261.
- CASE-2007-ChengHK #development
- Development of a Dual-Phase Virtual Metrology Scheme (FTC, HCH, CAK), pp. 270–275.