Jian Kuang 0001, Evangeline F. Y. Young
Optimization for Multiple Patterning Lithography with cutting process and beyond
DATE, 2016.
@inproceedings{DATE-2016-KuangY,
author = "Jian Kuang 0001 and Evangeline F. Y. Young",
booktitle = "{Proceedings of the 20th Conference and Exhibition on Design, Automation and Test in Europe}",
ee = "http://ieeexplore.ieee.org/document/7459278/",
isbn = "978-3-9815-3707-9",
pages = "43--48",
publisher = "{IEEE}",
title = "{Optimization for Multiple Patterning Lithography with cutting process and beyond}",
year = 2016,
}