@inproceedings{CASE-2007-KwonM,
	author        = "Ky Sang Kwon and Leon F. McGinnis",
	booktitle     = "{Proceedings of the Third International Conference on Automation Science and Engineering}",
	doi           = "10.1109/COASE.2007.4341777",
	isbn          = "978-1-4244-1154-2",
	pages         = "1075--1080",
	publisher     = "{IEEE}",
	title         = "{SysML-based Simulation Framework for Semiconductor Manufacturing}",
	year          = 2007,
}