A MEMS Stage for 3-Axis Nanopositioning
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Xinyu Liu, Keekyoung Kim, Yu Sun
A MEMS Stage for 3-Axis Nanopositioning
CASE, 2007.

CASE 2007
Full names Links ISxN
	author        = "Xinyu Liu and Keekyoung Kim and Yu Sun",
	booktitle     = "{Proceedings of the Third International Conference on Automation Science and Engineering}",
	doi           = "10.1109/COASE.2007.4341760",
	isbn          = "978-1-4244-1154-2",
	pages         = "1087--1092",
	publisher     = "{IEEE}",
	title         = "{A MEMS Stage for 3-Axis Nanopositioning}",
	year          = 2007,

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