@inproceedings{CASE-2009-Morrison,
	author        = "James R. Morrison",
	booktitle     = "{Proceedings of the Fifth International Conference on Automation Science and Engineering}",
	doi           = "10.1109/COASE.2009.5234135",
	isbn          = "978-1-4244-4578-3",
	pages         = "561--566",
	publisher     = "{IEEE}",
	title         = "{Regular flow line models for semiconductor cluster tools: A case of lot dependent process times}",
	year          = 2009,
}