A novel ontology-based knowledge engineering approach for yield symptom identification in semiconductor manufacturing
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Fang-Hsiang Su, Shi-Chung Chang, Chih-Min Fan, Ya-Jung Tsai, J. Jheng, Ching-Pin Kao, Chun-Yao Lu
A novel ontology-based knowledge engineering approach for yield symptom identification in semiconductor manufacturing
CASE, 2009.

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@inproceedings{CASE-2009-SuCFTJKL,
	author        = "Fang-Hsiang Su and Shi-Chung Chang and Chih-Min Fan and Ya-Jung Tsai and J. Jheng and Ching-Pin Kao and Chun-Yao Lu",
	booktitle     = "{Proceedings of the Fifth International Conference on Automation Science and Engineering}",
	doi           = "10.1109/COASE.2009.5234086",
	isbn          = "978-1-4244-4578-3",
	pages         = "433--438",
	publisher     = "{IEEE}",
	title         = "{A novel ontology-based knowledge engineering approach for yield symptom identification in semiconductor manufacturing}",
	year          = 2009,
}

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