Performance evaluation of deterministic flow lines: Redundant modules and application to semiconductor manufacturing equipment
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Kyungsu Park, James R. Morrison
Performance evaluation of deterministic flow lines: Redundant modules and application to semiconductor manufacturing equipment
CASE, 2010.

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@inproceedings{CASE-2010-ParkM,
	author        = "Kyungsu Park and James R. Morrison",
	booktitle     = "{Proceedings of the Sixth International Conference on Automation Science and Engineering}",
	doi           = "10.1109/COASE.2010.5584593",
	isbn          = "978-1-4244-5447-1",
	pages         = "45--50",
	publisher     = "{IEEE}",
	title         = "{Performance evaluation of deterministic flow lines: Redundant modules and application to semiconductor manufacturing equipment}",
	year          = 2010,
}

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