Andrea Schirru, Simone Pampuri, Giuseppe De Nicolao
Multilevel statistical process control of asynchronous multi-stream processes in semiconductor manufacturing
CASE, 2010.
@inproceedings{CASE-2010-SchirruPN10a,
author = "Andrea Schirru and Simone Pampuri and Giuseppe De Nicolao",
booktitle = "{Proceedings of the Sixth International Conference on Automation Science and Engineering}",
doi = "10.1109/COASE.2010.5584508",
isbn = "978-1-4244-5447-1",
pages = "57--62",
publisher = "{IEEE}",
title = "{Multilevel statistical process control of asynchronous multi-stream processes in semiconductor manufacturing}",
year = 2010,
}











