Regression methods for prediction of PECVD Silicon Nitride layer thickness
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Hendrik Purwins, Ahmed Nagi, Bernd Barak, Uwe Hockele, Andreas Kyek, Benjamin Lenz, Gunter Pfeifer, Kurt Weinzierl
Regression methods for prediction of PECVD Silicon Nitride layer thickness
CASE, 2011.

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@inproceedings{CASE-2011-PurwinsNBHKLPW,
	author        = "Hendrik Purwins and Ahmed Nagi and Bernd Barak and Uwe Hockele and Andreas Kyek and Benjamin Lenz and Gunter Pfeifer and Kurt Weinzierl",
	booktitle     = "{Proceedings of the Seventh International Conference on Automation Science and Engineering}",
	doi           = "10.1109/CASE.2011.6042426",
	isbn          = "978-1-4577-1730-7",
	pages         = "387--392",
	publisher     = "{IEEE}",
	title         = "{Regression methods for prediction of PECVD Silicon Nitride layer thickness}",
	year          = 2011,
}

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