@inproceedings{CASE-2011-SustoBL,
	author        = "Gian Antonio Susto and Alessandro Beghi and Cristina De Luca",
	booktitle     = "{Proceedings of the Seventh International Conference on Automation Science and Engineering}",
	doi           = "10.1109/CASE.2011.6042421",
	isbn          = "978-1-4577-1730-7",
	pages         = "262--267",
	publisher     = "{IEEE}",
	title         = "{A Predictive Maintenance System for Silicon Epitaxial Deposition}",
	year          = 2011,
}