Travelled to:1 × Italy
1 × Korea
1 × USA
Collaborated with:D.Kurz J.Pilz G.D.Nicolao G.A.Susto A.Beghi S.Pampuri A.Schirru Federica Acerbi Josef Obiltschnig Patrick Richter
Talks about:semiconductor (3) manufactur (3) metrolog (3) virtual (3) system (3) predict (2) mainten (2) sampl (2) model (2) decis (2)
Person: Cristina De Luca
DBLP: Luca:Cristina_De
Contributed to:
2013201220112018Wrote 6 papers:
- CASE-2013-KurzDP #monitoring #reliability
- Monitoring virtual metrology reliability in a sampling decision system (DK, CDL, JP), pp. 20–25.
- CASE-2012-KurzDP #using
- Sampling Decision System in semiconductor manufacturing using Virtual Metrology (DK, CDL, JP), pp. 74–79.
- CASE-2012-PampuriSSLBN #multi #process
- Multistep virtual metrology approaches for semiconductor manufacturing processes (SP, AS, GAS, CDL, AB, GDN), pp. 91–96.
- CASE-2011-PampuriSLN #maintenance #predict
- Proportional hazard model with ℓ1 Penalization applied to Predictive Maintenance in semiconductor manufacturing (SP, AS, CDL, GDN), pp. 250–255.
- CASE-2011-SustoBL #maintenance #predict
- A Predictive Maintenance System for Silicon Epitaxial Deposition (GAS, AB, CDL), pp. 262–267.
- CASE-2018-AcerbiNORL #modelling #robust
- Accuracy and Robustness Against Covariate Shift of Water Chiller Models (FA, GDN, JO, PR, CDL), pp. 809–816.