@inproceedings{CASE-2012-SustoSPNB,
	author        = "Gian Antonio Susto and Andrea Schirru and Simone Pampuri and Giuseppe De Nicolao and Alessandro Beghi",
	booktitle     = "{Proceedings of the Eighth International Conference on Automation Science and Engineering}",
	doi           = "10.1109/CoASE.2012.6386416",
	isbn          = "978-1-4673-0429-0",
	pages         = "358--363",
	publisher     = "{IEEE}",
	title         = "{An information-theory and Virtual Metrology-based approach to Run-to-Run semiconductor manufacturing control}",
	year          = 2012,
}