Gian Antonio Susto, Andrea Schirru, Simone Pampuri, Giuseppe De Nicolao, Alessandro Beghi
An information-theory and Virtual Metrology-based approach to Run-to-Run semiconductor manufacturing control
CASE, 2012.
@inproceedings{CASE-2012-SustoSPNB, author = "Gian Antonio Susto and Andrea Schirru and Simone Pampuri and Giuseppe De Nicolao and Alessandro Beghi", booktitle = "{Proceedings of the Eighth International Conference on Automation Science and Engineering}", doi = "10.1109/CoASE.2012.6386416", isbn = "978-1-4673-0429-0", pages = "358--363", publisher = "{IEEE}", title = "{An information-theory and Virtual Metrology-based approach to Run-to-Run semiconductor manufacturing control}", year = 2012, }