@inproceedings{CASE-2013-Geldmann,
	author        = "Christian Geldmann",
	booktitle     = "{Proceedings of the Ninth International Conference on Automation Science and Engineering}",
	doi           = "10.1109/CoASE.2013.6653991",
	pages         = "813--818",
	publisher     = "{IEEE}",
	title         = "{Fine registration of SEM and AFM images using Monte Carlo simulations}",
	year          = 2013,
}