Hong-Yue Jin, James R. Morrison
Transient scheduling of single armed cluster tools: Algorithms for wafer residency constraints
CASE, 2013.
@inproceedings{CASE-2013-JinM,
author = "Hong-Yue Jin and James R. Morrison",
booktitle = "{Proceedings of the Ninth International Conference on Automation Science and Engineering}",
doi = "10.1109/CoASE.2013.6653901",
pages = "856--861",
publisher = "{IEEE}",
title = "{Transient scheduling of single armed cluster tools: Algorithms for wafer residency constraints}",
year = 2013,
}











