Yu-Ting Kao, Shi-Chung Chang, Chun-Ming Chang
Target setting with consideration of target-induced operation variability for performance improvement of semiconductor fabrication
CASE, 2014.
@inproceedings{CASE-2014-KaoCC,
author = "Yu-Ting Kao and Shi-Chung Chang and Chun-Ming Chang",
booktitle = "{Proceedings of the 10th International Conference on Automation Science and Engineering}",
doi = "10.1109/CoASE.2014.6899413",
pages = "774--779",
publisher = "{IEEE}",
title = "{Target setting with consideration of target-induced operation variability for performance improvement of semiconductor fabrication}",
year = 2014,
}