FaJun Yang, Naiqi Wu, Liping Bai, MengChu Zhou
Optimal one-wafer cyclic scheduling analysis of transport-dominant single-arm multi-cluster tools
CASE, 2016.
@inproceedings{CASE-2016-YangWBZ,
	author        = "FaJun Yang and Naiqi Wu and Liping Bai and MengChu Zhou",
	booktitle     = "{Proceedings of the 12th International Conference on Automation Science and Engineering}",
	doi           = "10.1109/COASE.2016.7743574",
	isbn          = "978-1-5090-2409-4",
	pages         = "1405--1410",
	publisher     = "{IEEE}",
	title         = "{Optimal one-wafer cyclic scheduling analysis of transport-dominant single-arm multi-cluster tools}",
	year          = 2016,
}











