@inproceedings{CASE-2017-ChenWWWC,
	author        = "Ying-Jen Chen and Bo-Cheng Wang and Jei-Zheng Wu and Yi-Chia Wu and Chen-Fu Chien",
	booktitle     = "{Proceedings of the 13th International Conference on Automation Science and Engineering}",
	doi           = "10.1109/COASE.2017.8256190",
	isbn          = "978-1-5090-6781-7",
	pages         = "731--736",
	publisher     = "{IEEE}",
	title         = "{Big data analytic for multivariate fault detection and classification in semiconductor manufacturing}",
	year          = 2017,
}