@inproceedings{CASE-2018-KoppMPS,
	author        = "Denny Kopp and Lars Mönch and Detlef Pabst and Marcel Stehli",
	booktitle     = "{Proceedings of the 14th International Conference on Automation Science and Engineering}",
	doi           = "10.1109/COASE.2018.8560476",
	isbn          = "978-1-5386-3593-3",
	pages         = "638--641",
	publisher     = "{IEEE}",
	title         = "{Simulation-based Performance Assessment of Tool Requalification Strategies in Wafer Fabs}",
	year          = 2018,
}