@inproceedings{CASE-2018-RostamiBCY,
	author        = "Hamideh Rostami and Jakey Blue and Argon Chen and Claude Yugma",
	booktitle     = "{Proceedings of the 14th International Conference on Automation Science and Engineering}",
	doi           = "10.1109/COASE.2018.8560435",
	isbn          = "978-1-5386-3593-3",
	pages         = "1316--1321",
	publisher     = "{IEEE}",
	title         = "{Equipment Deterioration Modeling and Causes Diagnosis in Semiconductor Manufacturing}",
	year          = 2018,
}