@inproceedings{CASE-2018-YangWSQ,
	author        = "FaJun Yang and Naiqi Wu and Rong Su and Yan Qiao",
	booktitle     = "{Proceedings of the 14th International Conference on Automation Science and Engineering}",
	doi           = "10.1109/COASE.2018.8560461",
	isbn          = "978-1-5386-3593-3",
	pages         = "241--246",
	publisher     = "{IEEE}",
	title         = "{Cyclic Scheduling Analysis of Single-arm Cluster Tools with Wafer Residency Time Constraint and Chamber Cleaning Operations}",
	year          = 2018,
}