Taki Eddine Korabi, Guillaume Graton, El Mostafa El Adel, Mustapha Ouladsine, Jacques Pinaton
Monitoring of a sampled process data under Run-to-Run control: application to a semiconductor process
CASE, 2019.
@inproceedings{CASE-2019-KorabiGAOP,
author = "Taki Eddine Korabi and Guillaume Graton and El Mostafa El Adel and Mustapha Ouladsine and Jacques Pinaton",
booktitle = "{Proceedings of the 15th International Conference on Automation Science and Engineering}",
doi = "10.1109/COASE.2019.8843229",
isbn = "978-1-7281-0356-3",
pages = "930--935",
publisher = "{IEEE}",
title = "{Monitoring of a sampled process data under Run-to-Run control: application to a semiconductor process}",
year = 2019,
}











