Monitoring of a sampled process data under Run-to-Run control: application to a semiconductor process
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Taki Eddine Korabi, Guillaume Graton, El Mostafa El Adel, Mustapha Ouladsine, Jacques Pinaton
Monitoring of a sampled process data under Run-to-Run control: application to a semiconductor process
CASE, 2019.

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@inproceedings{CASE-2019-KorabiGAOP,
	author        = "Taki Eddine Korabi and Guillaume Graton and El Mostafa El Adel and Mustapha Ouladsine and Jacques Pinaton",
	booktitle     = "{Proceedings of the 15th International Conference on Automation Science and Engineering}",
	doi           = "10.1109/COASE.2019.8843229",
	isbn          = "978-1-7281-0356-3",
	pages         = "930--935",
	publisher     = "{IEEE}",
	title         = "{Monitoring of a sampled process data under Run-to-Run control: application to a semiconductor process}",
	year          = 2019,
}

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