Subwavelength Lithography and Its Potential Impact on Design and EDA
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Andrew B. Kahng, Y. C. Pati
Subwavelength Lithography and Its Potential Impact on Design and EDA
DAC, 1999.

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@inproceedings{DAC-1999-KahngP,
	author        = "Andrew B. Kahng and Y. C. Pati",
	booktitle     = "{Proceedings of the 36th Design Automation Conference}",
	doi           = "10.1145/309847.310072",
	pages         = "799--804",
	publisher     = "{ACM Press}",
	title         = "{Subwavelength Lithography and Its Potential Impact on Design and EDA}",
	year          = 1999,
}

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