Andrew B. Kahng, Y. C. Pati
Subwavelength Lithography and Its Potential Impact on Design and EDA
DAC, 1999.
@inproceedings{DAC-1999-KahngP,
author = "Andrew B. Kahng and Y. C. Pati",
booktitle = "{Proceedings of the 36th Design Automation Conference}",
doi = "10.1145/309847.310072",
pages = "799--804",
publisher = "{ACM Press}",
title = "{Subwavelength Lithography and Its Potential Impact on Design and EDA}",
year = 1999,
}











