Role of design in multiple patterning: technology development, design enablement and process control
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Rani S. Ghaida, Puneet Gupta
Role of design in multiple patterning: technology development, design enablement and process control
DATE, 2013.

DATE 2013
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@inproceedings{DATE-2013-GhaidaG,
	acmid         = "2485366",
	author        = "Rani S. Ghaida and Puneet Gupta",
	booktitle     = "{Proceedings of the 17th Conference on Design, Automation and Test in Europe}",
	isbn          = "978-1-4503-2153-2",
	pages         = "314--319",
	publisher     = "{EDA Consortium San Jose, CA, USA / ACM DL}",
	title         = "{Role of design in multiple patterning: technology development, design enablement and process control}",
	year          = 2013,
}

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