Ahmed Awad 0002, Atsushi Takahashi 0001, Chikaaki Kodama
A fast manufacturability aware Optical Proximity Correction (OPC) algorithm with adaptive wafer image estimation
DATE, 2016.
@inproceedings{DATE-2016-Awad0K,
author = "Ahmed Awad 0002 and Atsushi Takahashi 0001 and Chikaaki Kodama",
booktitle = "{Proceedings of the 20th Conference and Exhibition on Design, Automation and Test in Europe}",
ee = "http://ieeexplore.ieee.org/document/7459279/",
isbn = "978-3-9815-3707-9",
pages = "49--54",
publisher = "{IEEE}",
title = "{A fast manufacturability aware Optical Proximity Correction (OPC) algorithm with adaptive wafer image estimation}",
year = 2016,
}