Optimization for Multiple Patterning Lithography with cutting process and beyond
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Jian Kuang 0001, Evangeline F. Y. Young
Optimization for Multiple Patterning Lithography with cutting process and beyond
DATE, 2016.

DATE 2016
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@inproceedings{DATE-2016-KuangY,
	author        = "Jian Kuang 0001 and Evangeline F. Y. Young",
	booktitle     = "{Proceedings of the 20th Conference and Exhibition on Design, Automation and Test in Europe}",
	ee            = "http://ieeexplore.ieee.org/document/7459278/",
	isbn          = "978-3-9815-3707-9",
	pages         = "43--48",
	publisher     = "{IEEE}",
	title         = "{Optimization for Multiple Patterning Lithography with cutting process and beyond}",
	year          = 2016,
}


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