A Novel Protective Cover in Assembling of Micro Components in a SEM Chamber
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Aleksandra Cvetanovic, Andreja Cvetanovic, Daniela Andrijasevic, Ioanna Giouroudi, Werner Brenner
A Novel Protective Cover in Assembling of Micro Components in a SEM Chamber
CASE, 2006.

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@inproceedings{CASE-2006-CvetanovicCAGB,
	author        = "Aleksandra Cvetanovic and Andreja Cvetanovic and Daniela Andrijasevic and Ioanna Giouroudi and Werner Brenner",
	booktitle     = "{Proceedings of the Second International Conference on Automation Science and Engineering}",
	doi           = "10.1109/COASE.2006.326887",
	isbn          = "1-4244-0310-3",
	pages         = "242--246",
	publisher     = "{IEEE}",
	title         = "{A Novel Protective Cover in Assembling of Micro Components in a SEM Chamber}",
	year          = 2006,
}

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