@inproceedings{CASE-2007-LiuKS,
	author        = "Xinyu Liu and Keekyoung Kim and Yu Sun",
	booktitle     = "{Proceedings of the Third International Conference on Automation Science and Engineering}",
	doi           = "10.1109/COASE.2007.4341760",
	isbn          = "978-1-4244-1154-2",
	pages         = "1087--1092",
	publisher     = "{IEEE}",
	title         = "{A MEMS Stage for 3-Axis Nanopositioning}",
	year          = 2007,
}