Stem nanoposit$ (all stems)
2 papers:
- CASE-2010-JasperF #automation #performance
- Automated high-speed nanopositioning inside scanning electron microscopes (DJ, SF), pp. 704–709.
- CASE-2007-LiuKS
- A MEMS Stage for 3-Axis Nanopositioning (XL, KK, YS), pp. 1087–1092.