@inproceedings{CASE-2017-KinghorstGLCYFZ,
	author        = "Jakob Kinghorst and Omid Geramifard and Ming Luo and Hian-Leng Chan and Khoo Yong and Jens Folmer and Minjie Zou and Birgit Vogel-Heuser",
	booktitle     = "{Proceedings of the 13th International Conference on Automation Science and Engineering}",
	doi           = "10.1109/COASE.2017.8256274",
	isbn          = "978-1-5090-6781-7",
	pages         = "1260--1267",
	publisher     = "{IEEE}",
	title         = "{Hidden Markov model-based predictive maintenance in semiconductor manufacturing: A genetic algorithm approach}",
	year          = 2017,
}