@inproceedings{DAC-1979-Ozdemir,
	acmid         = "811744",
	author        = "Faik S. Ozdemir",
	booktitle     = "{Proceedings of the 16th Design Automation Conference}",
	pages         = "383--391",
	publisher     = "{ACM}",
	title         = "{Electron beam lithography}",
	year          = 1979,
}