Ruiqi Tian, D. F. Wong, Robert Boone
Model-based dummy feature placement for oxide chemical-mechanical polishing manufacturability
DAC, 2000.
@inproceedings{DAC-2000-TianWB,
author = "Ruiqi Tian and D. F. Wong and Robert Boone",
booktitle = "{Proceedings of the 37th Design Automation Conference}",
doi = "10.1145/337292.337609",
pages = "667--670",
publisher = "{ACM}",
title = "{Model-based dummy feature placement for oxide chemical-mechanical polishing manufacturability}",
year = 2000,
}