Kevin W. McCullen
Phase correct routing for alternating phase shift masks
DAC, 2004.
@inproceedings{DAC-2004-McCullen, author = "Kevin W. McCullen", booktitle = "{Proceedings of the 41st Design Automation Conference}", doi = "10.1145/996566.996659", isbn = "1-58113-828-8", pages = "317--320", publisher = "{ACM}", title = "{Phase correct routing for alternating phase shift masks}", year = 2004, }