Kevin W. McCullen
Phase correct routing for alternating phase shift masks
DAC, 2004.
@inproceedings{DAC-2004-McCullen,
author = "Kevin W. McCullen",
booktitle = "{Proceedings of the 41st Design Automation Conference}",
doi = "10.1145/996566.996659",
isbn = "1-58113-828-8",
pages = "317--320",
publisher = "{ACM}",
title = "{Phase correct routing for alternating phase shift masks}",
year = 2004,
}











