@inproceedings{DAC-2011-Singh,
	author        = "Vivek Singh",
	booktitle     = "{Proceedings of the 48th Design Automation Conference}",
	doi           = "10.1145/2024724.2024831",
	isbn          = "978-1-4503-0636-2",
	pages         = "459",
	publisher     = "{ACM}",
	title         = "{Lithography at 14nm and beyond: choices and challenges}",
	year          = 2011,
}