David Z. Pan, Lars Liebmann, Bei Yu, Xiaoqing Xu, Yibo Lin
Pushing multiple patterning in sub-10nm: are we ready?
DAC, 2015.
@inproceedings{DAC-2015-PanLYXL,
author = "David Z. Pan and Lars Liebmann and Bei Yu and Xiaoqing Xu and Yibo Lin",
booktitle = "{Proceedings of the 52nd Annual Design Automation Conference}",
doi = "10.1145/2744769.2747940",
isbn = "978-1-4503-3520-1",
pages = "6",
publisher = "{ACM}",
title = "{Pushing multiple patterning in sub-10nm: are we ready?}",
year = 2015,
}











