David Z. Pan, Lars Liebmann, Bei Yu, Xiaoqing Xu, Yibo Lin
Pushing multiple patterning in sub-10nm: are we ready?
DAC, 2015.
@inproceedings{DAC-2015-PanLYXL, author = "David Z. Pan and Lars Liebmann and Bei Yu and Xiaoqing Xu and Yibo Lin", booktitle = "{Proceedings of the 52nd Annual Design Automation Conference}", doi = "10.1145/2744769.2747940", isbn = "978-1-4503-3520-1", pages = "6", publisher = "{ACM}", title = "{Pushing multiple patterning in sub-10nm: are we ready?}", year = 2015, }