BibSLEIGH
BibSLEIGH corpus
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mainten (1)
predict (1)
deposit (1)
system (1)
silicon (1)

Stem epitaxi$ (all stems)

1 papers:

CASECASE-2011-SustoBL #maintenance #predict
A Predictive Maintenance System for Silicon Epitaxial Deposition (GAS, AB, CDL), pp. 262–267.
Bibliography of Software Language Engineering in Generated Hypertext (BibSLEIGH) is created and maintained by Dr. Vadim Zaytsev.
Hosted as a part of SLEBOK on GitHub.