Stem multistep$ (all stems)

2 papers:

CASE-2012-PampuriSSLBN #multi #process

Multistep virtual metrology approaches for semiconductor manufacturing processes (SP, AS, GAS, CDL, AB, GDN), pp. 91–96.

SAC-2009-ShenU #approximate #composition #concept #matrix #multi

A class of multistep sparse matrix strategies for concept decomposition matrix approximation (CS, MU), pp. 1714–1718.