@inproceedings{CASE-2007-MorrisonM,
	author        = "James R. Morrison and Maruthi Kumar Mutnuri",
	booktitle     = "{Proceedings of the Third International Conference on Automation Science and Engineering}",
	doi           = "10.1109/COASE.2007.4341741",
	isbn          = "978-1-4244-1154-2",
	pages         = "88--93",
	publisher     = "{IEEE}",
	title         = "{On the Throughput of Clustered Photolithography Tools: Wafer Advancement and Intrinsic Equipment Loss}",
	year          = 2007,
}