Travelled to:1 × USA
Collaborated with:J.R.Morrison
Talks about:photolithographi (1) throughput (1) intrins (1) cluster (1) advanc (1) wafer (1) equip (1) tool (1) loss (1)
Person: Maruthi Kumar Mutnuri
DBLP: Mutnuri:Maruthi_Kumar
Contributed to:
2007Wrote 1 papers:
- CASE-2007-MorrisonM #clustering #on the #throughput #tool support
- On the Throughput of Clustered Photolithography Tools: Wafer Advancement and Intrinsic Equipment Loss (JRM, MKM), pp. 88–93.