@inproceedings{CASE-2012-KurzDP,
	author        = "Daniel Kurz and Cristina De Luca and Jürgen Pilz",
	booktitle     = "{Proceedings of the Eighth International Conference on Automation Science and Engineering}",
	doi           = "10.1109/CoASE.2012.6386366",
	isbn          = "978-1-4673-0429-0",
	pages         = "74--79",
	publisher     = "{IEEE}",
	title         = "{Sampling Decision System in semiconductor manufacturing using Virtual Metrology}",
	year          = 2012,
}