@inproceedings{CASE-2012-PampuriSSLBN,
	author        = "Simone Pampuri and Andrea Schirru and Gian Antonio Susto and Cristina De Luca and Alessandro Beghi and Giuseppe De Nicolao",
	booktitle     = "{Proceedings of the Eighth International Conference on Automation Science and Engineering}",
	doi           = "10.1109/CoASE.2012.6386484",
	isbn          = "978-1-4673-0429-0",
	pages         = "91--96",
	publisher     = "{IEEE}",
	title         = "{Multistep virtual metrology approaches for semiconductor manufacturing processes}",
	year          = 2012,
}