Dae-Kyu Kim, Tae-Eog Lee, Hyun-Jung Kim
Optimal scheduling of transient cycles for single-armed cluster tools
CASE, 2013.
@inproceedings{CASE-2013-KimLK,
author = "Dae-Kyu Kim and Tae-Eog Lee and Hyun-Jung Kim",
booktitle = "{Proceedings of the Ninth International Conference on Automation Science and Engineering}",
doi = "10.1109/CoASE.2013.6653939",
pages = "874--879",
publisher = "{IEEE}",
title = "{Optimal scheduling of transient cycles for single-armed cluster tools}",
year = 2013,
}











