Optimal scheduling of transient cycles for single-armed cluster tools
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Dae-Kyu Kim, Tae-Eog Lee, Hyun-Jung Kim
Optimal scheduling of transient cycles for single-armed cluster tools
CASE, 2013.

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@inproceedings{CASE-2013-KimLK,
	author        = "Dae-Kyu Kim and Tae-Eog Lee and Hyun-Jung Kim",
	booktitle     = "{Proceedings of the Ninth International Conference on Automation Science and Engineering}",
	doi           = "10.1109/CoASE.2013.6653939",
	pages         = "874--879",
	publisher     = "{IEEE}",
	title         = "{Optimal scheduling of transient cycles for single-armed cluster tools}",
	year          = 2013,
}

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