Virtual metrology enabled early stage prediction for enhanced control of multi-stage fabrication processes
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Gian Antonio Susto, Adrian B. Johnston, Paul G. O'Hara, Seán F. McLoone
Virtual metrology enabled early stage prediction for enhanced control of multi-stage fabrication processes
CASE, 2013.

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@inproceedings{CASE-2013-SustoJOM,
	author        = "Gian Antonio Susto and Adrian B. Johnston and Paul G. O'Hara and Seán F. McLoone",
	booktitle     = "{Proceedings of the Ninth International Conference on Automation Science and Engineering}",
	doi           = "10.1109/CoASE.2013.6653980",
	pages         = "201--206",
	publisher     = "{IEEE}",
	title         = "{Virtual metrology enabled early stage prediction for enhanced control of multi-stage fabrication processes}",
	year          = 2013,
}

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