Travelled to:1 × Taiwan
1 × USA
Collaborated with:G.A.Susto A.B.Johnston S.F.McLoone S.Pampuri J.Wan M.Zanon
Talks about:process (2) predict (2) stage (2) semiconductor (1) manufactur (1) metrolog (1) virtual (1) mainten (1) insight (1) flexibl (1)
Person: Paul G. O'Hara
DBLP: O'Hara:Paul_G=
Contributed to:
20142013Wrote 3 papers:
- CASE-2014-PampuriSWJOM #process
- Insight extraction for semiconductor manufacturing processes (SP, GAS, JW, ABJ, PGO, SFM), pp. 786–791.
- CASE-2014-SustoWPZJOM #adaptation #flexibility #machine learning #maintenance #predict
- An adaptive machine learning decision system for flexible predictive maintenance (GAS, JW, SP, MZ, ABJ, PGO, SFM), pp. 806–811.
- CASE-2013-SustoJOM #multi #predict #process
- Virtual metrology enabled early stage prediction for enhanced control of multi-stage fabrication processes (GAS, ABJ, PGO, SFM), pp. 201–206.